Tunable MEMS Diffraction Gratings

V. Gowri Suresh; Nandita DasGupta; Shanti Bhattacharya

doi:10.1117/12.925113

15 October 2012 Tunable MEMS diffraction gratings

V. Gowri Suresh, Nandita DasGupta, Shanti Bhattacharya

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 854918 (2012) https://doi.org/10.1117/12.925113
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

Tunable gratings find applications in spectrometers, tunable cavity lasers and projection displays. In this paper, we discuss the design, modeling, fabrication process and optical characterization of a reflective type period tunable MEMS diffraction grating. The optical modeling of different grating periods for optimum efficiency is presented. A new fixed-fixed beam design with a uniform displacement over 33% of its length is proposed and simulated. The grating membranes are fabricated with gold metal. The optical characterization of the fabricated structure is presented.

Citation Download Citation

V. Gowri Suresh, Nandita DasGupta, and Shanti Bhattacharya "Tunable MEMS diffraction gratings", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854918 (15 October 2012); https://doi.org/10.1117/12.925113

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