Translator Disclaimer
Paper
15 October 2012 MEMS deformable mirrors: technology and applications
Author Affiliations +
Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85491B (2012) https://doi.org/10.1117/12.925268
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India
Abstract
The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amita Gupta, R. Singh, Monika Chaudhary, Shailesh Kumar, and A. K. Meena "MEMS deformable mirrors: technology and applications", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491B (15 October 2012); https://doi.org/10.1117/12.925268
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top