18 December 2012 Comprehensive modelling and simulation of micro-optical subsystems
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Designing optical subsystems not only requires consideration of the optical properties of the optical components but also examination of the properties of the mechanical subsystem structures such as e.g., alignment or mounting structures. This is essential since most optical subsystems extend over three dimensions and are realized in modular setups, where the optical components are mounted and adjusted by means of mechanical structures. Hence, the contour accuracy of these structures is crucial for the adjusted alignment of the optical components and therefore for the system’s performance. The contour accuracy depends on both the fabrication processes and the operational conditions of the optical subsystem. This leads to our concept of comprehensive modeling and simulation where not only optical properties are to be simulated but as well the influences of the mechanical system structures on the optical performance.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Sieber, I. Sieber, "Comprehensive modelling and simulation of micro-optical subsystems", Proc. SPIE 8550, Optical Systems Design 2012, 855002 (18 December 2012); doi: 10.1117/12.981181; https://doi.org/10.1117/12.981181


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