27 November 2012 Absorption modulation enhancement of Azo-polymer film induced by plasmonic field
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A thin photochromic film on top of the resist layer can be used as a virtual mask to fabricate super-resolution lithography patterns. In this letter, based on the azobenzene polymer, the absorption intensity of the 365nm LED is effectively modulated by 532nm laser, the modulation degree reaches to 87%.When the silver nanocubes are dropped onto the surface of the polymer film, the modulation degree is significantly higher than that without the nanoparticles in the same intensity of 532nm laser due to the field enhancement of excitation of surface plasmons. The absorption modulation features of the polymer film are favorable for the further smaller line width nanolithography.
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Xiangxian Wang, Xiangxian Wang, Douguo Zhang, Douguo Zhang, Qiang Fu, Qiang Fu, Hai Ming, Hai Ming, Wenxuan Wu, Wenxuan Wu, Qijin Zhang, Qijin Zhang, } "Absorption modulation enhancement of Azo-polymer film induced by plasmonic field", Proc. SPIE 8555, Optoelectronic Devices and Integration IV, 85550B (27 November 2012); doi: 10.1117/12.999639; https://doi.org/10.1117/12.999639

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