26 November 2012 The measurement of optical reflector with complex surface using nano-CMM
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Abstract
Among variety of methods to measure complex surfaces, coordinate measurement is widely used in reverse engineering and measuring complex topography. In this paper, a coordinate measuring system based on 3D tactile probe is introduced. This system can measure complex surface with resolution of 1nm, measuring range of 25mm×25mm×5mm. The component of the measuring system, the principle and advantages of the probe are also introduced as the major part. We used the nano-CMM to test an optical reflector with sine curve surface. The fluctuation of the topography is about 5 micrometers. The result is compared with the data of AFM and the source of deviation is analyzed in the conclusions.
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Zhichao Wu, Zhichao Wu, Tong Guo, Tong Guo, Jinping Chen, Jinping Chen, Xing Fu, Xing Fu, Xiaotang Hu, Xiaotang Hu, } "The measurement of optical reflector with complex surface using nano-CMM", Proc. SPIE 8557, Optical Design and Testing V, 85570T (26 November 2012); doi: 10.1117/12.999383; https://doi.org/10.1117/12.999383
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