26 November 2012 Research on the key parameters influencing the anti-vibration capability of time-frequency-domain interferometer
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Abstract
This paper introduces a time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry, and designs an experimental system to test the anti-vibration ability of this method. In the system, a plane mirror is measured under the external vibrations simulated by the standard mirror propelled by PZT. During the measurement, each of the key parameters is assigned different values. By analyzing the testing results, the law of the parameters’ influence on system anti-vibration capability can be obtained. According to the law, the optimization parameters can be determined so that the system has the maximum anti- vibration capability.
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Fanghua Zhang, Qun Hao, Yao Hu, Qiudong Zhu, "Research on the key parameters influencing the anti-vibration capability of time-frequency-domain interferometer", Proc. SPIE 8557, Optical Design and Testing V, 85571K (26 November 2012); doi: 10.1117/12.999642; https://doi.org/10.1117/12.999642
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