Absolute measurement of optical surface profile with a Fizeau interferometer

Osami Sasaki; Akihiro Watanabe; Samuel Choi; Takamasa Suzuki

doi:10.1117/12.2000145

20 November 2012 Absolute measurement of optical surface profile with a Fizeau interferometer

Osami Sasaki, Akihiro Watanabe, Samuel Choi, Takamasa Suzuki

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 85630B (2012) https://doi.org/10.1117/12.2000145
Event: Photonics Asia, 2012, Beijing, China

Abstract

An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.

Citation Download Citation

Osami Sasaki, Akihiro Watanabe, Samuel Choi, and Takamasa Suzuki "Absolute measurement of optical surface profile with a Fizeau interferometer", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630B (20 November 2012); https://doi.org/10.1117/12.2000145

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KEYWORDS

Wavefronts

Signal detection

Fizeau interferometers

Charge-coupled devices

Atrial fibrillation

Interferometers

Semiconductor lasers

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