20 November 2012 Absolute measurement of optical surface profile with a Fizeau interferometer
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Abstract
An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.
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Osami Sasaki, Osami Sasaki, Akihiro Watanabe, Akihiro Watanabe, Samuel Choi, Samuel Choi, Takamasa Suzuki, Takamasa Suzuki, } "Absolute measurement of optical surface profile with a Fizeau interferometer", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630B (20 November 2012); doi: 10.1117/12.2000145; https://doi.org/10.1117/12.2000145
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