20 November 2012 Low loss optical modulator based on slot-loaded waveguide for unmodified CMOS process
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Abstract
We propose a novel optical modulator based on poly-on-silicon slot-loaded waveguide to fit the CMOS process and it demonstrated a large loss reduction from 54.2dB/cm to 22.9dB/cm numerically compared with strip-loaded waveguide structure.
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Wei Tan, Qifeng Long, Zhijuan Tu, Xingjun Wang, Huaxiang Yi, Zhiping Zhou, "Low loss optical modulator based on slot-loaded waveguide for unmodified CMOS process", Proc. SPIE 8564, Nanophotonics and Micro/Nano Optics, 856424 (20 November 2012); doi: 10.1117/12.2001228; https://doi.org/10.1117/12.2001228
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