6 March 2013 High energy diode pumped 5th harmonic generation of Nd: YAG laser
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This paper reports a high power diode pump 5th harmonic generation of Nd: YAG laser system, which could generate up to 300 mW TEM00 mode output with 100 Hz repetition rate at 213 nm. A diode pump module was specially designed for a high efficiency and good beam quality at the fundamental wavelength 1064 nm. An amplifier was set up out of the cavity to boost up the energy level of fundamental wavelength. In order to get high efficiency of the 5th harmonic generation, the cavity of the fundamental wavelength is EOM Q-switched which could generate very high peak power of the fundamental wavelength laser for extra cavity harmonic generations. Finally, 14% conversion efficiency from IR to UV was achieved, which is the highest efficiency in the market to the best of our knowledge right now. 213 nm is a very good substitute wavelength of 193 nm for different UV applications, the system of which is more compact, higher energy, less maintenance and better beam quality than the system of 193 nm.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yang Yu, Yang Yu, Chee Yuen Cheng, Chee Yuen Cheng, Yong Poo Chia, Yong Poo Chia, Wee Hoong Wong, Wee Hoong Wong, Saw Soon Yong, Saw Soon Yong, Weijuan Qu, Weijuan Qu, Xiaoyuan Peng, Xiaoyuan Peng, } "High energy diode pumped 5th harmonic generation of Nd: YAG laser", Proc. SPIE 8599, Solid State Lasers XXII: Technology and Devices, 859926 (6 March 2013); doi: 10.1117/12.2005830; https://doi.org/10.1117/12.2005830


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