22 February 2013 Fiber profilometer for measurement of hard-to-access areas
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Abstract
A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.
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Zhuang Liu, Zhuang Liu, Xia Yu, Xia Yu, Qi Jie Wang, Qi Jie Wang, Shaw Wei Kok, Shaw Wei Kok, Ying Zhang, Ying Zhang, } "Fiber profilometer for measurement of hard-to-access areas", Proc. SPIE 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 86030Z (22 February 2013); doi: 10.1117/12.2003784; https://doi.org/10.1117/12.2003784
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