High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision

B. Jaeggi; B. Neuenschwander; Thomas Meier; M. Zimmermann; G. Hennig

doi:10.1117/12.2004099

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13 March 2013 High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision

B. Jaeggi, B. Neuenschwander, Thomas Meier, M. Zimmermann, G. Hennig

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Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86070E (2013) https://doi.org/10.1117/12.2004099
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

For surface and 3D structuring ultra-short pulsed laser systems are used in combination with mechanical axes, whereas the mechanical axes can include electrical motor as well as beam deflecting systems like a galvo scanner. The motion of the axes is synchronized with the clock of the laser pulses, which is usually in the range of 100 kHz and above, by a modification of the electronic axes control. This work shows the scalability of the ablation process up to MHz-regime in relation to surface quality and ablation efficiency. Furthermore the transfer of the machining strategy from a synchronized galvo scanner to a rotating cylinder setup is shown.

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B. Jaeggi, B. Neuenschwander, Thomas Meier, M. Zimmermann, and G. Hennig "High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070E (13 March 2013); https://doi.org/10.1117/12.2004099

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