High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision

B. Jaeggi; B. Neuenschwander; Thomas Meier; M. Zimmermann; G. Hennig

doi:10.1117/12.2004099

13 March 2013 High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision

B. Jaeggi, B. Neuenschwander, Thomas Meier, M. Zimmermann, G. Hennig

Author Affiliations +

Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86070E (2013) https://doi.org/10.1117/12.2004099
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

For surface and 3D structuring ultra-short pulsed laser systems are used in combination with mechanical axes, whereas the mechanical axes can include electrical motor as well as beam deflecting systems like a galvo scanner. The motion of the axes is synchronized with the clock of the laser pulses, which is usually in the range of 100 kHz and above, by a modification of the electronic axes control. This work shows the scalability of the ablation process up to MHz-regime in relation to surface quality and ablation efficiency. Furthermore the transfer of the machining strategy from a synchronized galvo scanner to a rotating cylinder setup is shown.

Citation Download Citation

B. Jaeggi, B. Jaeggi, B. Neuenschwander, B. Neuenschwander, Thomas Meier, Thomas Meier, M. Zimmermann, M. Zimmermann, G. Hennig, G. Hennig, "High throughput laser micro machining on a rotating cylinder with ultra short pulses at highest precision", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070E (13 March 2013); doi: 10.1117/12.2004099; https://doi.org/10.1117/12.2004099

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