Micro-hole drilling with femtosecond fiber laser

Huan Huang; Lih-Mei Yang; Jian Liu

doi:10.1117/12.2004888

13 March 2013 Micro-hole drilling with femtosecond fiber laser

Huan Huang, Lih-Mei Yang, Jian Liu

Author Affiliations +

Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86070K (2013) https://doi.org/10.1117/12.2004888
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

Femtosecond (fs) laser becomes more popular in precise material procesing due to the limited heat affected zone (HAZ) over longer laser pulses. In this paper, micro-hole drilling in ambient air with fs fiber laser at 1030 nm is presented. Micro holes were fabricated in both transparent (polymer and glass), and non-transparent materials (metal and tissue). A scanning electron microscopy is used to investigate the hole quality. Both percusiion drilling and trepanning drilling methods were evaluated and compared. High quality micro holes with no visible micro-cracks were demonstrated. Micro-hole drilling in hard and soft tissues with no collateral thermal damage is observed. This study can be extended to MEMS, microfluidic, and micro surgery applications.

Citation Download Citation

Huan Huang, Huan Huang, Lih-Mei Yang, Lih-Mei Yang, Jian Liu, Jian Liu, } "Micro-hole drilling with femtosecond fiber laser", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070K (13 March 2013); doi: 10.1117/12.2004888; https://doi.org/10.1117/12.2004888

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