Quantum cascade laser-based sensing to investigate fast laser ablation process

Francesco P. Mezzapesa; Vincenzo Spagnolo; Antonio Ancona; Gaetano Scamarcio

doi:10.1117/12.2001148

13 March 2013 Quantum cascade laser-based sensing to investigate fast laser ablation process

Francesco P. Mezzapesa, Vincenzo Spagnolo, Antonio Ancona, Gaetano Scamarcio

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Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86070O (2013) https://doi.org/10.1117/12.2001148
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

We demonstrated a sensing technique for in-line ablation rate detection using a quantum cascade laser (QCL) under external optical feedback. The design of the QCL-based diagnostic system allowed to monitor the voltage modulation at the laser terminals induced by fast dynamics in the ablation process. Real-time detection of the ablation front velocity as well as in-situ investigations of the surface temperature were provided. Experimental results on fast ablation rates per pulse correlate well with the theoretical prediction. The detection range was demonstrated to be limited only by the QCL-probe emission wavelength, which is scalable up to the THz spectral region.

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Francesco P. Mezzapesa, Francesco P. Mezzapesa, Vincenzo Spagnolo, Vincenzo Spagnolo, Antonio Ancona, Antonio Ancona, Gaetano Scamarcio, Gaetano Scamarcio, "Quantum cascade laser-based sensing to investigate fast laser ablation process ", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070O (13 March 2013); doi: 10.1117/12.2001148; https://doi.org/10.1117/12.2001148

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