Sub-ns and ps laser performance and results

J. Kilmer; M. Terraciano; Y. Yin

doi:10.1117/12.2004206

13 March 2013 Sub-ns and ps laser performance and results

J. Kilmer, M. Terraciano, Y. Yin

Author Affiliations +

Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86071K (2013) https://doi.org/10.1117/12.2004206
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

In the field of ablative-based material processing there is a desire to use short pulse width (subns) laser sources. If the pulse width is too long <10 ns the processing is fast, but crude. If the pulse width is too short <10 ps the processing is precise, but slow. In an effort to balance the process fidelity with material removal rate, a unique TEM₀₀ mode quality sub-ns (~0.5 ns nominal pulse width) laser was developed.

Citation Download Citation

J. Kilmer, J. Kilmer, M. Terraciano, M. Terraciano, Y. Yin, Y. Yin, } "Sub-ns and ps laser performance and results", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86071K (13 March 2013); doi: 10.1117/12.2004206; https://doi.org/10.1117/12.2004206

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