Silicon backside machining using a nanosecond 2-µm Tm:fiber laser

Lawrence Shah; Tobias Bonhoff; Thomas Ferhat; Ashraf F. El-Sherif; Mark Ramme; Christina C. C. Willis; Matthieu Baudelet; Pankaj Kadwani; Christian Gaida; Martin Gebhardt; Ilya Mingareev; Martin Richardson

doi:10.1117/12.2004878

9 March 2013 Silicon backside machining using a nanosecond 2-μm Tm:fiber laser

Lawrence Shah, Tobias Bonhoff, Thomas Ferhat, Ashraf F. El-Sherif, Mark Ramme, Christina C. C. Willis, Matthieu Baudelet, Pankaj Kadwani, Christian Gaida, Martin Gebhardt, Ilya Mingareev, Martin Richardson

Author Affiliations +

Proceedings Volume 8612, Micromachining and Microfabrication Process Technology XVIII; 861207 (2013) https://doi.org/10.1117/12.2004878
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Utilizing the transparency of silicon at 2 μm, we are able to ablate the backside of 500-μm thick silicon wafers without causing any damage to the front surface using a novel nanosecond Tm:fiber laser system. We report on our high energy/high peak power nanosecond Tm:fiber laser and provide an initial description of the effects of laser parameters such as pulse duration and energy density on the ablation, and compare thresholds for front and backside machining. The ability to selectively machine the backside of silicon wafers without disturbing the front surface may lead to new processing techniques for advanced manufacturing in solar cell and microelectronics industries.

Citation Download Citation

Lawrence Shah, Tobias Bonhoff, Thomas Ferhat, Ashraf F. El-Sherif, Mark Ramme, Christina C. C. Willis, Matthieu Baudelet, Pankaj Kadwani, Christian Gaida, Martin Gebhardt, Ilya Mingareev, and Martin Richardson "Silicon backside machining using a nanosecond 2-μm Tm:fiber laser", Proc. SPIE 8612, Micromachining and Microfabrication Process Technology XVIII, 861207 (9 March 2013); https://doi.org/10.1117/12.2004878

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available