9 March 2013 Doping method to glass material using a CO2 laser
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Abstract
In this paper, we present the investigation results on doping to a BK7 glass sample ( OHARA, S-BSL7 ) by use of a CO2 laser. CO2 laser system generates CW ( continuous wave ) laser beam with a wavelength of 10.6 μm. Laser beam irradiated on a sample substrate ( 30 mm × 5 mm × 0.67 mm thick ). A surface of the glass was applied fluorescent material. The doped regions were created by translating the glass sample perpendicular to the laser axis with a distance of 2 mm and a scan speed of 1 mm/s. After processing, the cross section of sample was analyzed by energy dispersive X-ray analysis ( EDX ) in scanning electron microscope for revealing the contained elements in the glass. The results show that carbon was widely distributed in the doped regions although the original glass material did not contain carbon element.
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K. Nakamura, T. Tamaki, "Doping method to glass material using a CO2 laser", Proc. SPIE 8612, Micromachining and Microfabrication Process Technology XVIII, 861209 (9 March 2013); doi: 10.1117/12.2005463; https://doi.org/10.1117/12.2005463
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