Method of creating microscale rapid prototypes using SLM based holographic lithography

Joseph L. Lawson; Nathan Jenness; Scott Wilson; Robert L. Clark

doi:10.1117/12.2003164

9 March 2013 Method of creating microscale prototypes using SLM based holographic lithography

Joseph L. Lawson, Nathan Jenness, Scott Wilson, Robert L. Clark

Proceedings Volume 8612, Micromachining and Microfabrication Process Technology XVIII; 86120L (2013) https://doi.org/10.1117/12.2003164
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

A method of generating arbitrary structures using spatial light modulator (SLM) based holograms with multiphoton absorption is presented. Current methodologies for designing 3D prototyping, such as G-code, are not ideally suited for holographic lithography and therefore limit its functionality or requires additional complex processing. The process outlined here allows a microstructure to be fabricated based on designs from commercially available CAD software. CAD software enables the microstructures to be designed and then realized using dynamic holographic lithography methods enabling designers a simple, quick, and robust method of fabricating novel microstructures. Holographic patterning routines such as raster scans of one or multiple focal points, holograms encoded with two or three dimensional spatial information, or a combination of both techniques may be utilized with this methodology. The process described allows for the development of complex structures that would be difficult to otherwise program using traditional methods. No limitations are placed on the form or function of the designed components, enabling undercut and interlocking features to be fabricated. This methodology also enables the location and orientation of the structures to be controlled dynamically simplifying the process of creating multi-scaled structures or complex arrays of arbitrary structures. As a proof of concept demonstration, a simple cantilever beam was modeled and fabricated.

Citation Download Citation

Joseph L. Lawson, Nathan Jenness, Scott Wilson, and Robert L. Clark "Method of creating microscale prototypes using SLM based holographic lithography", Proc. SPIE 8612, Micromachining and Microfabrication Process Technology XVIII, 86120L (9 March 2013); https://doi.org/10.1117/12.2003164

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