Dynamic optical methods for direct laser written waveguides

P. S. Salter; M. J. Booth

doi:10.1117/12.2005054

5 March 2013 Dynamic optical methods for direct laser written waveguides

P. S. Salter, M. J. Booth

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86130A (2013) https://doi.org/10.1117/12.2005054
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Direct laser writing is widely used to fabricate 3D waveguide devices by modi cation of a materials refractive index. The fabrication delity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides.

Citation Download Citation

P. S. Salter and M. J. Booth "Dynamic optical methods for direct laser written waveguides", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130A (5 March 2013); https://doi.org/10.1117/12.2005054

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