5 March 2013 Wire grid polarizers fabricated by low-angle deposition
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Abstract
Oblique angle metal deposition has been combined with high aspect ratio imprinted structures to create wire grid polarizers (WGP’s) for use as polarization recyclers in liquid crystal displays. The optical results for the oblique deposition WGP show contrast comparable to a conventionally etched WGP. In addition, the WGP showed improved spectral and spatial uniformity as compared to a multilayer reflective polarizer. The next steps to the fabrication of meter sized WGP are proposed.
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M. P. C. Watts, M. P. C. Watts, M. Little, M. Little, E. Egan, E. Egan, A. Hochbaum, A. Hochbaum, C. Johns, C. Johns, S. Stephansen, S. Stephansen, } "Wire grid polarizers fabricated by low-angle deposition", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130E (5 March 2013); doi: 10.1117/12.2008812; https://doi.org/10.1117/12.2008812
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