Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit

Chris Summitt; Sunglin Wang; Lee Johnson; Melissa Zaverton; Tom Milster; Yuzuru Takashima

doi:10.1117/12.2004996

5 March 2013 Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit

Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tom Milster, Yuzuru Takashima

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86130K (2013) https://doi.org/10.1117/12.2004996
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We demonstrated a 45 degree micro mirror by a direct laser writing method. A flat, smooth and clearly defined mirror surface has been fabricated despite of the finite size and long tail of the point spread function of the exposure tool.

Citation Download Citation

Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tom Milster, and Yuzuru Takashima "Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130K (5 March 2013); https://doi.org/10.1117/12.2004996

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