5 March 2013 Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit
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Abstract
We demonstrated a 45 degree micro mirror by a direct laser writing method. A flat, smooth and clearly defined mirror surface has been fabricated despite of the finite size and long tail of the point spread function of the exposure tool.
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Chris Summitt, Chris Summitt, Sunglin Wang, Sunglin Wang, Lee Johnson, Lee Johnson, Melissa Zaverton, Melissa Zaverton, Tom Milster, Tom Milster, Yuzuru Takashima, Yuzuru Takashima, } "Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130K (5 March 2013); doi: 10.1117/12.2004996; https://doi.org/10.1117/12.2004996
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