Light sensitive waveguides fabricated by vacuum assisted microfluidics

Sarfaraz Baig; Guomin Jiang; Michael R. Wang

doi:10.1117/12.2004414

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5 March 2013 Light sensitive waveguides fabricated by vacuum assisted microfluidics

Sarfaraz Baig, Guomin Jiang, Michael R. Wang

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Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 861310 (2013) https://doi.org/10.1117/12.2004414
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We report on the fabrication of a light sensitive waveguide via vacuum assisted microfluidic (VAM) soft lithographic technique. UV curable light insensitive waveguides function like typical polymer waveguides with desired mode confinements while the light sensitive waveguides formed by an azobenzene based polymer resin can achieve refractive index modulation through green or blue laser illumination. The refractive index modulation is instant and reversible in the light sensitive waveguide. The VAM technique is used for the fabrication of multisection waveguides using different resins at the same time which is unique compared to conventional single material waveguide fabrication. The effective fabrication of various waveguide sections with the light sensitive azobenzene based UV curable resin can result in many functional waveguide devices for photonics applications.

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Sarfaraz Baig, Guomin Jiang, and Michael R. Wang "Light sensitive waveguides fabricated by vacuum assisted microfluidics ", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 861310 (5 March 2013); https://doi.org/10.1117/12.2004414

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