5 March 2013 Hyperspectral Fabry-Pérot filters for HgCdTe infrared detectors
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Abstract
The combination of HgCdTe detectors and Fabry-Pérot filters (FPFs) is highly desirable for hyperspectral detection in the infrared band over a broad wavelength range. The results of comprehensive modeling of distributed- Bragg-reflector-based tunable FPFs that can be used with HgCdTe array detectors for hyperspectral imaging modules are presented, focusing on the impact of FPF non-idealities on optical performance. The effects of surface and interface roughness on the spectral resolution and transmissivity of the cavity was explored to determine if certain thin film deposition techniques are suitable to economically fabricate FPFs. The impact of varying field-of-view (FOV) and incident angles are also discussed. Finally, the impact of FPF bowing on spectral resolution is discussed.
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Yong Chang, Yong Chang, Christoph H. Grein, Christoph H. Grein, Silviu Velicu, Silviu Velicu, Michael Morley, Michael Morley, Neelam Gupta, Neelam Gupta, } "Hyperspectral Fabry-Pérot filters for HgCdTe infrared detectors", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 861316 (5 March 2013); doi: 10.1117/12.2007508; https://doi.org/10.1117/12.2007508
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