5 March 2013 Light confinement effect of non-spherical nanoscale solid immersion lenses
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We report on the light confinement effect observed in non-ideally shaped (i.e., non-spherical) nanoscale solid immersion lenses (SILs). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these non-circular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that non-ideal SILs exhibit a spot size reduction comparable to that of spherical SILs. When the SIL size is wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in shape implies a large tolerance in nano-SIL fabrication.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Myun-Sik Kim, Myun-Sik Kim, Toralf Scharf, Toralf Scharf, David Nguyen, David Nguyen, Ethan Keeler, Ethan Keeler, Skyler Rydberg, Skyler Rydberg, Wataru Nakagawa, Wataru Nakagawa, Gaël Osowecki, Gaël Osowecki, Hans Peter Herzig, Hans Peter Herzig, Reinhard Voelkel, Reinhard Voelkel, "Light confinement effect of non-spherical nanoscale solid immersion lenses", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131B (5 March 2013); doi: 10.1117/12.2002145; https://doi.org/10.1117/12.2002145

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