5 March 2013 Holographic fabrication of woodpile-type photonic crystal templates using silicon based single reflective optical element
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Abstract
In this work, we present the holographic fabrication of woodpile-type photonic crystal templates in photosensitive polymer using a silicon-on-PDMS based reflective optical element. The reflective optical element is fabricated from four silicon chips placed inside a polydimethylsiloxane (PDMS) mold, which reflects a circularly or elliptically polarized beam into four linearly polarized side beams, arranged four-fold symmetrically about a central beam, with electric fields normal to the incident plane, and also reduces the laser intensity of the side beams. With a single beam and a single reflective optical element, we can generate the desired laser beam intensities and polarization of each beam, thereby creating woodpile-type photonic crystal templates, and improving the contrast of 3D structures.
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Jeffrey Lutkenhaus, Jeffrey Lutkenhaus, David George, David George, Kris Ohlinger, Kris Ohlinger, Hualiang Zhang, Hualiang Zhang, Zsolt Poole, Zsolt Poole, Kevin P. Chen, Kevin P. Chen, Yuankun Lin, Yuankun Lin, } "Holographic fabrication of woodpile-type photonic crystal templates using silicon based single reflective optical element", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131C (5 March 2013); doi: 10.1117/12.2002882; https://doi.org/10.1117/12.2002882
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