5 March 2013 An improved wire grid polarizer for thermal infrared applications
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Abstract
Moxtek has developed a high contrast IR polarizer on silicon suitable for long wavelength thermal IR applications using our aluminum nanowire, large area patterning capabilities. Between 7 and 15 microns, our 144 nm pitch polarizers transmit better than 70% of the passing polarization state and have a contrast ratio better than 40 dB. Transmission and reflectance measurements were made using a Fourier Transform Infrared (FTIR) spectrometer with instrument accuracy verified using silicon and germanium reference standards. Results were compared to RCWA modeling of the wire grid polarizer (WGP) performance on antireflection-coated wafers. The FTIR instrument noise floor limited the maximum contrast measurement to about 40 dB, but high polarizer contrast was verified at 10.6 μm using a CO2 laser and pyroelectric detector. A continuous wave Gaussian beam from a CO2 laser was used for Laser Damage Threshold (LDT) testing and showed LDT values of 110 kW/cm2 and 10 kW/cm2 in the blocking and passing states respectively. Analysis of laser damage threshold test samples shows the damage propagating from defects in the anti-reflection (AR) coating. Removing these AR coating defects should improve LDT performance and transmission in the thermal IR.
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Matthew C. George, Matthew C. George, Jonathan Bergquist, Jonathan Bergquist, Bin Wang, Bin Wang, Rumyana Petrova, Rumyana Petrova, Hua Li, Hua Li, Eric Gardner, Eric Gardner, } "An improved wire grid polarizer for thermal infrared applications", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131I (5 March 2013); doi: 10.1117/12.2005318; https://doi.org/10.1117/12.2005318
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