9 March 2013 Reliability of MEM relays for zero leakage logic
Author Affiliations +
Abstract
Micro-electro-mechanical (MEM) relays are an intriguing alternative to transistors for ultra-low-power digital logic applications [1]. This paper investigates various failure modes for logic relays. Experimental results are presented to show that structural fatigue, dielectric charging, and contact stiction are not reliability-limiting issues. Contact resistance instability caused by surface oxidation and contamination is the primary challenge, and can be influenced by device design and operating conditions.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yenhao Chen, Yenhao Chen, Rhesa Nathanael, Rhesa Nathanael, Jack Yaung, Jack Yaung, Louis Hutin, Louis Hutin, Tsu-Jae King Liu, Tsu-Jae King Liu, } "Reliability of MEM relays for zero leakage logic", Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 861404 (9 March 2013); doi: 10.1117/12.2005719; https://doi.org/10.1117/12.2005719
PROCEEDINGS
7 PAGES


SHARE
Back to Top