9 March 2013 Reliability of MEM relays for zero leakage logic
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Micro-electro-mechanical (MEM) relays are an intriguing alternative to transistors for ultra-low-power digital logic applications [1]. This paper investigates various failure modes for logic relays. Experimental results are presented to show that structural fatigue, dielectric charging, and contact stiction are not reliability-limiting issues. Contact resistance instability caused by surface oxidation and contamination is the primary challenge, and can be influenced by device design and operating conditions.
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Yenhao Chen, Rhesa Nathanael, Jack Yaung, Louis Hutin, Tsu-Jae King Liu, "Reliability of MEM relays for zero leakage logic", Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 861404 (9 March 2013); doi: 10.1117/12.2005719; https://doi.org/10.1117/12.2005719

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