MEMS and MOEMS resonant frequencies analysis by Digital Holography Microscopy (DHM)

Y. Emery; E. Solanas; N. Aspert; A. Michalska; J. Parent; E. Cuche

doi:10.1117/12.2009221

9 March 2013 MEMS and MOEMS resonant frequencies analysis by Digital Holography Microscopy (DHM)

Y. Emery, E. Solanas, N. Aspert, A. Michalska, J. Parent, E. Cuche

Proceedings Volume 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII; 86140A (2013) https://doi.org/10.1117/12.2009221
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Digital Holographic Microscopes (DHMs) have unique features especially relevant for static and dynamical MEMS characterization. They provide both 3D topography with interferometric resolution and intensity image in a single acquisition at camera rate, without any lateral or vertical scanning. In this presentation, DHM is operated in conjunction with a laser pulsed stroboscopic module providing synchronization of camera, laser pulses, and MEMS excitation signal up to 25 MHz. Three methods for DHM analysis of resonant frequencies are presented with concrete examples. The first method, gives the more general, precise and complete information. Sine wave excitation with increasing (or decreasing) frequencies is used. For each frequency, laser pulses are used to “freeze” the movement of the MEMS. Using the stroboscopic synchronization, each period of the excitation signal is sampled at high resolution, and the topography of the MEMS can be measured at each of those samples points. As implemented, the change of frequency is a continuous sweep: quantitative values in term of displacement amplitude and Bode diagrams can be measured for nonlinear resonances as well. The second method uses sine wave excitation with increasing (or decreasing) frequencies. For each frequency, the optical signal is integrated over an entire number of periods of the MEMS. At resonance, constructive and destructive interference build up on the intensity images. It enables fast frequency scan over large ranges. But it provides neither quantitative values of displacement amplitude, nor Bode diagrams. The third method is to measure the system response to an impulse or chirp excitation signal for instance, and to make a Fourier analysis of this response to determine resonant frequencies. This method is less sensitive as it spreads the excitation energy in many frequencies.

Citation Download Citation

Y. Emery, E. Solanas, N. Aspert, A. Michalska, J. Parent, and E. Cuche "MEMS and MOEMS resonant frequencies analysis by Digital Holography Microscopy (DHM)", Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 86140A (9 March 2013); https://doi.org/10.1117/12.2009221

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available