13 March 2013 Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Author Affiliations +
Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 μm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
U. Hofmann, U. Hofmann, M. Aikio, M. Aikio, J. Janes, J. Janes, F. Senger, F. Senger, V. Stenchly, V. Stenchly, M. Weiss, M. Weiss, H.-J. Quenzer, H.-J. Quenzer, B. Wagner, B. Wagner, W. Benecke, W. Benecke, "Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160C (13 March 2013); doi: 10.1117/12.2006189; https://doi.org/10.1117/12.2006189

Back to Top