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13 March 2013 Wide steering angle microscanner based on curved surface
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Intensive industrial and academic research is oriented towards the design and fabrication of optical beam steering systems based on MEMS technology. In most of these systems, the scanning is achieved by rotating a flat micromirror around a central axis in which the main challenge is achieving a wide mirror rotation angle. In this work, a novel method of optical beam scanning based on reflection from a curved surface is presented. The scanning occurs when the optical axis of the curved surface is displaced with respect to the optical axis of the incident beam. To overcome the possible deformation of the spot with the scanning angle, the curved surface is designed with a specific aspherical profile. Moreover, the scanning exhibits a more linearized scanning angle-displacement relation than the conventional spherical profile. The presented scanner is fabricated using DRIE technology on an SOI wafer. The curved surface (reflector) is metalized and attached to a comb-drive actuator fabricated in the same lithography step. A single-mode fiber, behaving as a Gaussian beam source, is positioned on the substrate facing the mirror. The reflected optical beam angle and spotsize in the far field is recorded versus the relative shift between the fiber and the curved mirror. The spot size is plotted versus the scanning angle and a scanning spot size uniformity of about ±10% is obtained for optical deflection angles up to 100 degrees. As the optical beam is propagating parallel to the wafer substrate, a completely integrated laser scanner can be achieved with filters and actuators self-aligned on the same chip that allows low cost and mass production of this important product.
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Yasser Sabry, Diaa Khalil, Bassam Saadany, and Tarik Bourouina "Wide steering angle microscanner based on curved surface", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160F (13 March 2013);

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