13 March 2013 Tunable cylindrical microlenses based on aluminum nitride membranes
Author Affiliations +
We introduce sputtered aluminum nitride thin films for tunable micro-optics. During lens fabrication, AlN is deposited on a silicon substrate. Silicon is structured by using DRIE, which allows fabrication of circular, rectangular and irregular membrane shapes. In this contribution, we present the design, fabrication and characterization of AlN membranes for tunable cylindrical lenses. An optimized “dogbone” membrane is presented, which deflects cylindrically and has a small footprint. Compared to conventional rectangular membranes the optically useful area is doubled. The load deflection characteristic is investigated and basic relations between the refractive power and applied pressure are found. The relation can be used for tailoring the membrane properties, i.e. their residual stress, for a specific application. According to this calculation, a refractive power of 25 dpt with a lens aperture of 3x3 mm2 is achieved for 12 kPa of applied pressure. The cylindrical deflection of the “dogbone” membrane is measured. The maximum shape difference in measured to be 270 nm.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steffen Leopold, Steffen Leopold, Daniel Paetz, Daniel Paetz, Fabian Knoebber, Fabian Knoebber, Oliver Ambacher, Oliver Ambacher, Stefan Sinzinger, Stefan Sinzinger, Martin Hoffmann, Martin Hoffmann, } "Tunable cylindrical microlenses based on aluminum nitride membranes", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 861611 (13 March 2013); doi: 10.1117/12.2005131; https://doi.org/10.1117/12.2005131


Design, modeling, and simulation of MEMS pressure sensors
Proceedings of SPIE (October 24 2013)
Oscillation behavior of two MEMS structures
Proceedings of SPIE (May 28 2002)
Reciprocating silicon microtribometer
Proceedings of SPIE (January 15 2003)
Planar plano convex microlens in silica using ICP CVD and...
Proceedings of SPIE (December 17 2012)
Mounting large lenses for the MMT's f 5 wide field...
Proceedings of SPIE (September 29 2004)

Back to Top