5 March 2013 A 19-element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator
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Proceedings Volume 8617, MEMS Adaptive Optics VII; 861702 (2013) https://doi.org/10.1117/12.2003017
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States
A 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM’s characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics.
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Weimin Wang, Weimin Wang, Fenggang Tao, Fenggang Tao, Qiang Wang, Qiang Wang, Chuankai Qiu, Chuankai Qiu, Zexiang Chen, Zexiang Chen, Jun Yao, Jun Yao, "A 19-element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator", Proc. SPIE 8617, MEMS Adaptive Optics VII, 861702 (5 March 2013); doi: 10.1117/12.2003017; https://doi.org/10.1117/12.2003017

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