5 March 2013 A continuous single-crystal-silicon membrane deformable mirror using bimorph spring
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Proceedings Volume 8617, MEMS Adaptive Optics VII; 861704 (2013) https://doi.org/10.1117/12.2002785
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States
Abstract
We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.
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Tong Wu, Tong Wu, Takashi Sasaki, Takashi Sasaki, Masayuki Akiyama, Masayuki Akiyama, Kazuhiro Hane, Kazuhiro Hane, } "A continuous single-crystal-silicon membrane deformable mirror using bimorph spring", Proc. SPIE 8617, MEMS Adaptive Optics VII, 861704 (5 March 2013); doi: 10.1117/12.2002785; https://doi.org/10.1117/12.2002785
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