5 March 2013 Performance analysis of two high actuator count MEMS deformable mirrors
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Proceedings Volume 8617, MEMS Adaptive Optics VII; 861705 (2013) https://doi.org/10.1117/12.2005299
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States
Two new MEMS deformable mirrors have been designed and fabricated, one having a continuous facesheet with an active aperture of 20mm and 2040 actuators and the other, a similarly sized segmented tip tilt piston DM containing 1021 elements and 3063 actuators. The surface figures, electro mechanical performances, and actuator yield of these devices, with statistical information, are reported here. The statistical distributions of these measurements directly illustrate the surface variance of Boston Micromachines deformable mirrors. Measurements of the surface figure were also performed with the elements at different actuation states. Also presented here are deviations of the surface figure under actuation versus at its rest state, the electromechanical distribution, and a dynamic analysis.
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Peter J. Ryan, Peter J. Ryan, Steven A. Cornelissen, Steven A. Cornelissen, Charlie V. Lam, Charlie V. Lam, Paul A. Bierden, Paul A. Bierden, "Performance analysis of two high actuator count MEMS deformable mirrors", Proc. SPIE 8617, MEMS Adaptive Optics VII, 861705 (5 March 2013); doi: 10.1117/12.2005299; https://doi.org/10.1117/12.2005299

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