Changes in the Mg profile and in dislocations induced by high temperature annealing of blue LEDs

M. Meneghini; N. Trivellin; M. Berti; T. Cesca; A. Gasparotto; A. Vinattieri; F. Bogani; D. Zhu; C. J. Humphreys; G. Meneghesso; E. Zanoni

doi:10.1117/12.2003542

27 March 2013 Changes in the Mg profile and in dislocations induced by high temperature annealing of blue LEDs

M. Meneghini, N. Trivellin, M. Berti, T. Cesca, A. Gasparotto, A. Vinattieri, F. Bogani, D. Zhu, C. J. Humphreys, G. Meneghesso, E. Zanoni

Author Affiliations +

Proceedings Volume 8625, Gallium Nitride Materials and Devices VIII; 86251P (2013) https://doi.org/10.1117/12.2003542
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

The efficiency of the injection and recombination processes in InGaN/GaN LEDs is governed by the properties of the active region of the devices, which strongly depend on the conditions used for the growth of the epitaxial material. To improve device quality, it is very important to understand how the high temperatures used during the growth process can modify the quality of the epitaxial material. With this paper we present a study of the modifications in the properties of InGaN/GaN LED structures induced by high temperature annealing: thermal stress tests were carried out at 900 °C, in nitrogen atmosphere, on selected samples. The efficiency and the recombination dynamics were evaluated by photoluminescence measurements (both integrated and time-resolved), while the properties of the epitaxial material were studied by Secondary Ion Mass Spectroscopy (SIMS) and Rutherford Backscattering (RBS) channeling measurements. Results indicate that exposure to high temperatures may lead to: (i) a significant increase in the photoluminescence efficiency of the devices; (ii) a decrease in the parasitic emission bands located between 380 nm and 400 nm; (iii) an increase in carrier lifetime, as detected by time-resolved photoluminescence measurements. The increase in device efficiency is tentatively ascribed to an improvement in the crystallographic quality of the samples.

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M. Meneghini, N. Trivellin, M. Berti, T. Cesca, A. Gasparotto, A. Vinattieri, F. Bogani, D. Zhu, C. J. Humphreys, G. Meneghesso, and E. Zanoni "Changes in the Mg profile and in dislocations induced by high temperature annealing of blue LEDs", Proc. SPIE 8625, Gallium Nitride Materials and Devices VIII, 86251P (27 March 2013); https://doi.org/10.1117/12.2003542

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KEYWORDS

Annealing

Luminescence

Light emitting diodes

Magnesium

Temperature metrology

Gallium nitride

Crystals

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