6 March 2013 Spectroscopy-on-chip applications of silicon photonics
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In recent years silicon photonics has become a mature technology enabling the integration of a variety of optical and optoelectronic functions by means of advanced CMOS technology. While most efforts in this field have gone to telecom and datacom/interconnect applications, there is a rapidly growing interest in using the same technology for sensing applications, ranging from refractive index sensing to spectroscopic sensing. In this paper the prospect of silicon photonics for absorption, fluorescence and Raman spectroscopy on-a-chip will be discussed. To allow spectroscopy in the visible and near infrared the silicon photonics platform is extended with silicon nitride waveguides.
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Roel Baets, Roel Baets, Ananth Z. Subramanian, Ananth Z. Subramanian, Ashim Dhakal, Ashim Dhakal, Shankar K. Selvaraja, Shankar K. Selvaraja, Katarzyna Komorowska, Katarzyna Komorowska, Frédéric Peyskens, Frédéric Peyskens, Eva Ryckeboer, Eva Ryckeboer, Nebiyu Yebo, Nebiyu Yebo, Gunther Roelkens, Gunther Roelkens, Nicolas Le Thomas, Nicolas Le Thomas, } "Spectroscopy-on-chip applications of silicon photonics", Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 86270I (6 March 2013); doi: 10.1117/12.2010498; https://doi.org/10.1117/12.2010498

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