Integrated surface plasmon resonance resonator using silicon on insulator

Geum-Yoon Oh; Doo-Gun Kim; Seon Hoon  Kim; Hyun Chul Ki; Tae Un  Kim; Hong-Seung Kim; Tae-Kyeong Lee; Byeong-Hyeon Lee; Young-Wan Choi

doi:10.1117/12.2004946

13 March 2013 Integrated surface plasmon resonance resonator using silicon on insulator

Geum-Yoon Oh, Doo-Gun Kim, Seon Hoon Kim, Hyun Chul Ki, Tae Un Kim, Hong-Seung Kim, Tae-Kyeong Lee, Byeong-Hyeon Lee, Young-Wan Choi

Author Affiliations +

Proceedings Volume 8627, Integrated Optics: Devices, Materials, and Technologies XVII; 862719 (2013) https://doi.org/10.1117/12.2004946
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65° with Au thickness of 35 nm for the change of the refractive index Δn = 1x10^-3.

Citation Download Citation

Geum-Yoon Oh, Geum-Yoon Oh, Doo-Gun Kim, Doo-Gun Kim, Seon Hoon Kim, Seon Hoon Kim, Hyun Chul Ki, Hyun Chul Ki, Tae Un Kim, Tae Un Kim, Hong-Seung Kim, Hong-Seung Kim, Tae-Kyeong Lee, Tae-Kyeong Lee, Byeong-Hyeon Lee, Byeong-Hyeon Lee, Young-Wan Choi, Young-Wan Choi, } "Integrated surface plasmon resonance resonator using silicon on insulator", Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 862719 (13 March 2013); doi: 10.1117/12.2004946; https://doi.org/10.1117/12.2004946

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years