Fabrication of high-efficiency heterogeneous Si/III-V integration with short optical vertical interconnect access

Doris K. T. Ng; Jing Pu; Qian Wang; Kim-Peng Lim; Yongqiang Wei; Yadong Wang; Yicheng Lai; Seng-Tiong Ho

doi:10.1117/12.2002786

6 March 2013 Fabrication of high-efficiency heterogeneous Si/III-V integration with short optical vertical interconnect access

Doris K. T. Ng, Jing Pu, Qian Wang, Kim-Peng Lim, Yongqiang Wei, Yadong Wang, Yicheng Lai, Seng-Tiong Ho

Author Affiliations +

Proceedings Volume 8628, Optoelectronic Integrated Circuits XV; 86280M (2013) https://doi.org/10.1117/12.2002786
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Silicon nanophotonic platform based on a silicon-on-insulator substrate enables dense photonic integration due to transparency for light propagation and ultra-high refractive index contrast for light confinement. Here, we integrate silicon together with III-V for high-efficiency heterogeneous Silicon/III-V and short vertical optical interconnect access. The fabrication involves 3 critical processes: 1) obtaining more than 80% maximum bonded areas of Si with III-V, 2) precise alignment of III-V nano-devices on top of the passive devices and 3) vertical sidewall etch profile of Si and III-V devices. The measurement results show around 90% coupling efficiency. The realization of this heterogeneous Si/III-V integration platform will open up enormous opportunities for photonic system on silicon through integrating various devices.

Citation Download Citation

Doris K. T. Ng, Jing Pu, Qian Wang, Kim-Peng Lim, Yongqiang Wei, Yadong Wang, Yicheng Lai, and Seng-Tiong Ho "Fabrication of high-efficiency heterogeneous Si/III-V integration with short optical vertical interconnect access", Proc. SPIE 8628, Optoelectronic Integrated Circuits XV, 86280M (6 March 2013); https://doi.org/10.1117/12.2002786

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available