14 March 2013 Silicon nanomembrane based photonic crystal waveguide true-time-delay lines on a glass substrate
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Proceedings Volume 8629, Silicon Photonics VIII; 86291E (2013) https://doi.org/10.1117/12.2004731
Event: SPIE OPTO, 2013, San Francisco, California, United States
Abstract
We demonstrate photonic crystal waveguide true-time-delay lines fabricated on a large area (>2cm × 2cm) silicon nanomembrane transferred onto a glass substrate. The photonic crystal waveguides are designed to provide large time delay values within a short length. 17.1 μm × 10 μm subwavelength grating (SWG) couplers are employed in order to enable efficient light coupling from and to a fiber. Photonic crystal tapers are implemented at the stripphotonic crystal waveguide interfaces to minimize loss and provide larger time delay values. A large group index of ~28.5 is calculated from the measurement data, thus indicating achievability of time delay larger than 58ps per millimeter length of the delay line within a tuning range of 20nm.
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Harish Subbaraman, Harish Subbaraman, Xiaochuan Xu, Xiaochuan Xu, Che-Yun Lin, Che-Yun Lin, Amir Hosseini, Amir Hosseini, Ray T. Chen, Ray T. Chen, } "Silicon nanomembrane based photonic crystal waveguide true-time-delay lines on a glass substrate", Proc. SPIE 8629, Silicon Photonics VIII, 86291E (14 March 2013); doi: 10.1117/12.2004731; https://doi.org/10.1117/12.2004731
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