2D silicon-based surface-normal vertical cavity photonic crystal
waveguide array for high-density optical interconnects

JaeHyun Ahn; Harish Subbaraman; Liang Zhu; Swapnajit Chakravarty; Emanuel Tutuc; Ray T. Chen

doi:10.1117/12.2009449

27 February 2013 2D silicon-based surface-normal vertical cavity photonic crystal waveguide array for high-density optical interconnects

JaeHyun Ahn, Harish Subbaraman, Liang Zhu, Swapnajit Chakravarty, Emanuel Tutuc, Ray T. Chen

Author Affiliations +

Proceedings Volume 8630, Optoelectronic Interconnects XIII; 86300D (2013) https://doi.org/10.1117/12.2009449
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

In this paper, we present the design guidelines, fabrication challenges and device evaluation results of a surface-normal photonic crystal waveguide array for high-density optical interconnects. We utilize the slow light effect of photonic crystals to increase the effective interaction length between photons and medium, which in turn can be used to decrease the physical length and make compact devices. The effect of the structural parameters variations on the guided mode are studied in order to provide a guideline for fabrication. Photonic crystal waveguides are vertically implemented in a silicon-on insulator substrate. Our structure possesses advantages such as universal design, CMOS compatibility, and simple fabrication process, suitable for high dense on-chip applications. Transmission results show increase of power near 1.67 μm wavelength, which agrees with our simulation results.

Citation Download Citation

JaeHyun Ahn, Harish Subbaraman, Liang Zhu, Swapnajit Chakravarty, Emanuel Tutuc, and Ray T. Chen "2D silicon-based surface-normal vertical cavity photonic crystal waveguide array for high-density optical interconnects", Proc. SPIE 8630, Optoelectronic Interconnects XIII, 86300D (27 February 2013); https://doi.org/10.1117/12.2009449

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KEYWORDS

Waveguides

Photonic crystals

Silicon

Scanning electron microscopy

Etching

Optical interconnects

Slow light

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