4 February 2013 Tailoring of optical properties of porous nanocolumnar structures and their device applications by oblique angle deposition
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Abstract
We reported the controlled growth and optical properties of porous nanocolumnar structures by the oblique angle deposition (OAD) method using an electron-beam evaporation system. Distributed Bragg reflectors, graded refractive index films, and antireflective coatings were studied to apply to various devices including vertical cavity surface emitting lasers, light-emitting diodes, solar cells, and sensors. The characteristics of the fabricated devices were measured. These results suggest that the tailoring of optical properties by a simple OAD technique is very promising for optical and optoelectronic device applications.
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Jae Su Yu, Jung Woo Leem, "Tailoring of optical properties of porous nanocolumnar structures and their device applications by oblique angle deposition", Proc. SPIE 8631, Quantum Sensing and Nanophotonic Devices X, 863119 (4 February 2013); doi: 10.1117/12.2005700; https://doi.org/10.1117/12.2005700
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