4 February 2013 Tailoring of optical properties of porous nanocolumnar structures and their device applications by oblique angle deposition
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Abstract
We reported the controlled growth and optical properties of porous nanocolumnar structures by the oblique angle deposition (OAD) method using an electron-beam evaporation system. Distributed Bragg reflectors, graded refractive index films, and antireflective coatings were studied to apply to various devices including vertical cavity surface emitting lasers, light-emitting diodes, solar cells, and sensors. The characteristics of the fabricated devices were measured. These results suggest that the tailoring of optical properties by a simple OAD technique is very promising for optical and optoelectronic device applications.
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Jae Su Yu, Jae Su Yu, Jung Woo Leem, Jung Woo Leem, } "Tailoring of optical properties of porous nanocolumnar structures and their device applications by oblique angle deposition", Proc. SPIE 8631, Quantum Sensing and Nanophotonic Devices X, 863119 (4 February 2013); doi: 10.1117/12.2005700; https://doi.org/10.1117/12.2005700
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