21 February 2013 Free-standing monolithic LiNbO3 photonic crystal slabs
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In this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO3 photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO3. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89°. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO3 structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO3 is needed.
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Jun Deng, Jun Deng, Sudheer Kumar Vanga, Sudheer Kumar Vanga, Sajid Hussian, Sajid Hussian, Hongwei Gao, Hongwei Gao, Soon Thor Lim, Soon Thor Lim, Ching Eng Png, Ching Eng Png, Xiang Ning, Xiang Ning, Andrew A. Bettiol, Andrew A. Bettiol, Aaron J. Danner, Aaron J. Danner, } "Free-standing monolithic LiNbO3 photonic crystal slabs", Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320H (21 February 2013); doi: 10.1117/12.2004085; https://doi.org/10.1117/12.2004085

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