21 February 2013 Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures
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Abstract
Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.
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Akram A. Khosroabadi, Akram A. Khosroabadi, R. A. Norwood, R. A. Norwood, } "Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures", Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320I (21 February 2013); doi: 10.1117/12.2002827; https://doi.org/10.1117/12.2002827
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