15 March 2013 High contrast gratings for high-precision metrology
Author Affiliations +
Proceedings Volume 8633, High Contrast Metastructures II; 86330M (2013) https://doi.org/10.1117/12.2006074
Event: SPIE OPTO, 2013, San Francisco, California, United States
Experiments in the field of high-precision optical metrology are crucially limited by thermal noise of the optical components such as mirrors or beam splitters. Amorphous coatings stacks are found to be a main source for these thermal fluctuations. In this contribution we present approaches to realize coating free optical components based on resonant high contrast gratings (HCGs) made of crystalline silicon. It is shown that beside classical cavity mirrors the concept of HCGs can also be used for reflective cavity couplers. We compare the advantages and challenges of these HCG reflectors with distributed Bragg reflectors made of crystalline coatings for applications in optical metrology.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefanie Kroker, Stefanie Kroker, Stefan Steiner, Stefan Steiner, Thomas Käsebier, Thomas Käsebier, Ernst-Bernhard Kley, Ernst-Bernhard Kley, Andreas Tünnermann, Andreas Tünnermann, } "High contrast gratings for high-precision metrology", Proc. SPIE 8633, High Contrast Metastructures II, 86330M (15 March 2013); doi: 10.1117/12.2006074; https://doi.org/10.1117/12.2006074


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