Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95μm

Karolina Zogal; Tobias Gruendl; Christian Gierl; Sujoy Paul; Christian Grasse; Peter Meissner; Marcus-Christian Amann; Franko Kueppers

doi:10.1117/12.2004257

13 March 2013 Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95-μm

Karolina Zogal, Tobias Gruendl, Christian Gierl, Sujoy Paul, Christian Grasse, Peter Meissner, Marcus-Christian Amann, Franko Kueppers

Author Affiliations +

Proceedings Volume 8639, Vertical-Cavity Surface-Emitting Lasers XVII; 86390C (2013) https://doi.org/10.1117/12.2004257
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We present surface micro-machined micro-electro mechanical-system (MEMS) tunable vertical-cavity surfaceemitting lasers (VCSEL) with rectangular and triangular shaped quantum wells (QWs) emitting around 1:95 μm predestined for broadband tunable diode laser absorption spectroscopy. The VCSELs show single-mode operation and high side-mode suppression-ratio SMSR < 50 dB within the whole tuning range of 50nm and 35 nm, the fibre-coupled optical power of 1:0mW and 1:76mW and the threshold current of 2:5mA and 2:0mA for the rectangular and triangular shaped QWs respectively. The 3 dB modulation frequency of the MEMS is 110 Hz.

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Karolina Zogal, Tobias Gruendl, Christian Gierl, Sujoy Paul, Christian Grasse, Peter Meissner, Marcus-Christian Amann, and Franko Kueppers "Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95-μm", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390C (13 March 2013); https://doi.org/10.1117/12.2004257

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