13 March 2013 Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror
Author Affiliations +
Abstract
We demonstrate a giant wavelength-temperature dependence of wavelength of a micromachined 850nm VCSEL with a thermally actuated metal/semiconductor cantilever mirror. The modeling shows a possibility of giant temperature dependence of wavelength of several nm/K, which is determined by cantilever length and metal thickness. The fabricated 850nm VCSEL exhibits a temperature dependence of -1.6 nm/K, and a wavelength tuning of 35 nm in 850 nm band was obtained by changing the device temperature by 12K. In addition, electro-thermal tuning was demonstrated using integrated micro heater. Continuous wavelength shift of 15 nm was obtained with heating power of 40 mW.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Nakahama, M. Nakahama, H. Sano, H. Sano, S. Inoue, S. Inoue, A. Matsutani, A. Matsutani, T. Sakaguchi, T. Sakaguchi, F. Koyama, F. Koyama, } "Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390F (13 March 2013); doi: 10.1117/12.2003698; https://doi.org/10.1117/12.2003698
PROCEEDINGS
6 PAGES


SHARE
Back to Top