Translator Disclaimer
Paper
13 March 2013 Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror
Author Affiliations +
Abstract
We demonstrate a giant wavelength-temperature dependence of wavelength of a micromachined 850nm VCSEL with a thermally actuated metal/semiconductor cantilever mirror. The modeling shows a possibility of giant temperature dependence of wavelength of several nm/K, which is determined by cantilever length and metal thickness. The fabricated 850nm VCSEL exhibits a temperature dependence of -1.6 nm/K, and a wavelength tuning of 35 nm in 850 nm band was obtained by changing the device temperature by 12K. In addition, electro-thermal tuning was demonstrated using integrated micro heater. Continuous wavelength shift of 15 nm was obtained with heating power of 40 mW.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Nakahama, H. Sano, S. Inoue, A. Matsutani, T. Sakaguchi, and F. Koyama "Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390F (13 March 2013); https://doi.org/10.1117/12.2003698
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top