Paper
13 March 2013 Improved single-mode emission characteristics of long-wavelength wafer-fused vertical-cavity surface-emitting lasers by intra-cavity patterning
Nicolas Volet, Tomasz Czyszanowski, Jarosław Walczak, Lukas Mutter, Benjamin Dwir, Zlatko Micković, Pascal Gallo, Vladimir Iakovlev, Alexei Sirbu, Andrei Caliman, Alexandru Mereuta, Elyahou Kapon
Author Affiliations +
Abstract
We report on transverse mode discrimination in long-wavelength wafer-fused vertical-cavity surface-emitting lasers (VCSELs) incorporating ring-shaped air gap patterns at the fused interface between the active region and the top distributed Bragg reflector (DBR). These 60-nm deep patterns were implemented with the aim of favoring the fundamental mode while preserving high output power. The VCSELs under consideration emit in the 1310-nm band and incorporate an AlGaInAs-based quantum well active region, a regrown circular tunnel junction and undoped GaAs/AlGaAs DBRs. A large batch of devices with varying pattern dimensions was investigated by on-wafer mapping, allowing significant statistical analysis leading to conclusions on their typical behavior. We observe experimentally a dependence of the side-mode suppression ratio on the geometrical parameters of the patterns. In particular, we identified a design that statistically increases the maximal single-mode emitted power by more than 20%. Numerical simulations of the patterned-cavity VCSELs based on our fully three dimensional electrical, thermal and optical VCSEL computational model support these observations. They show that patterns with a large inner diameter actually confine the first-order transverse mode and enhance its modal gain. In smaller devices, this mode is pushed out of the optical aperture and suffers larger losses. Optimized parameters were found numerically for enhancing the single-mode properties of the devices with negligible penalty on emitted power and threshold current.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nicolas Volet, Tomasz Czyszanowski, Jarosław Walczak, Lukas Mutter, Benjamin Dwir, Zlatko Micković, Pascal Gallo, Vladimir Iakovlev, Alexei Sirbu, Andrei Caliman, Alexandru Mereuta, and Elyahou Kapon "Improved single-mode emission characteristics of long-wavelength wafer-fused vertical-cavity surface-emitting lasers by intra-cavity patterning", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390S (13 March 2013); https://doi.org/10.1117/12.2002512
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Cited by 3 scholarly publications.
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KEYWORDS
Vertical cavity surface emitting lasers

Wafer-level optics

3D modeling

Interfaces

Optical lithography

Optics manufacturing

Quantum wells

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