4 March 2013 Fabrication and characterization of nitride-based blue light-emitting diodes on moth-eye patterned sapphire substrate (MPSS)
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Abstract
The fabrication procedure of a moth-eye patterned sapphire substrate (MPSS), which can enhance the light extraction efficiency of nitride-based light emitting diodes (LEDs) has been examined. The optimization of surface morphology after the etching of the MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch of 460nm, and corn height ranging from 50 to 350nm. The light extraction efficiency of blue-LEDs grown on a series of MPSS was enhanced about 1.4 times compared with the devices grown on a flat sapphire substrate. We found that if corn height exceeds 150nm, the MPSS effect is sufficiently observed.
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T. Tsuchiya, T. Tsuchiya, S. Umeda, S. Umeda, Mihoko Sowa, Mihoko Sowa, T. Kondo, T. Kondo, T. Kitano, T. Kitano, M. Mori, M. Mori, A. Suzuki, A. Suzuki, K. Naniwae, K. Naniwae, H. Sekine, H. Sekine, M. Iwaya, M. Iwaya, T. Takeuchi, T. Takeuchi, S. Kamiyama, S. Kamiyama, I. Akasaki, I. Akasaki, } "Fabrication and characterization of nitride-based blue light-emitting diodes on moth-eye patterned sapphire substrate (MPSS) ", Proc. SPIE 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII, 86410J (4 March 2013); doi: 10.1117/12.2003527; https://doi.org/10.1117/12.2003527
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