1 March 2013 Holographic diffraction gratings to measure micromovements
Author Affiliations +
Abstract
Holographic diffraction gratings can measure micro movements, with a system that detects each period of the moving grating. One of the important features of this device is the grating period, which determines the measurement accuracy. The period can be on the order of fractions of micron, with high reproducibility and with an error of a quarter of period. One of the qualities of this system is its robustness; the measures are invariant to noise induced by device movements and environment thermal changes.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arturo Olivares-Pérez, Mayra Alejandra Lara-Peña, Janeth Alexandra García-Monge, Pavel Alejandro Valencia-Acuña, Joan Manuel Villa-Hernández, Israel Fuentes-Tapia, "Holographic diffraction gratings to measure micromovements", Proc. SPIE 8644, Practical Holography XXVII: Materials and Applications, 864415 (1 March 2013); doi: 10.1117/12.2005439; https://doi.org/10.1117/12.2005439
PROCEEDINGS
9 PAGES


SHARE
Back to Top